Design and Mechanical Sensitivity Analysis of a MEMS Tuning Fork Gyroscope with an Anchored Leverage Mechanism

Design and Mechanical Sensitivity Analysis of a MEMS Tuning Fork Gyroscope with an Anchored Leverage Mechanism

This paper presents the design and analysis of a new micro-electro-mechanical system (MEMS) tuning fork gyroscope (TFG), which can effectively improve the mechanical sensitivity of the gyroscope sense-mode by the designed leverage mechanism. A micromachined TFG with an anchored leverage mechanism is...

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Bibliographic Details
Main Authors: Zezhang Li, Shiqiao Gao, Lei Jin, Haipeng Liu, Yanwei Guan, Shigang Peng
Format: Article
Language:English
Published: MDPI AG 2019-08-01
Series:Sensors
Subjects:
mechanical sensitivity
tuning fork gyroscope
anchored leverage mechanism
stiffness ratio
coordinate transformation method
Online Access:https://www.mdpi.com/1424-8220/19/16/3455

Internet

https://www.mdpi.com/1424-8220/19/16/3455

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