Design and Mechanical Sensitivity Analysis of a MEMS Tuning Fork Gyroscope with an Anchored Leverage Mechanism
This paper presents the design and analysis of a new micro-electro-mechanical system (MEMS) tuning fork gyroscope (TFG), which can effectively improve the mechanical sensitivity of the gyroscope sense-mode by the designed leverage mechanism. A micromachined TFG with an anchored leverage mechanism is...
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| Format: | Article |
| Language: | English |
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MDPI AG
2019-08-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/19/16/3455 |
| _version_ | 1811305394210865152 |
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| author | Zezhang Li Shiqiao Gao Lei Jin Haipeng Liu Yanwei Guan Shigang Peng |
| author_facet | Zezhang Li Shiqiao Gao Lei Jin Haipeng Liu Yanwei Guan Shigang Peng |
| author_sort | Zezhang Li |
| collection | DOAJ |
| description | This paper presents the design and analysis of a new micro-electro-mechanical system (MEMS) tuning fork gyroscope (TFG), which can effectively improve the mechanical sensitivity of the gyroscope sense-mode by the designed leverage mechanism. A micromachined TFG with an anchored leverage mechanism is designed. The dynamics and mechanical sensitivity of the design are theoretically analyzed. The improvement rate of mechanical sensitivity (IRMS) is introduced to represent the optimization effect of the new structure compared with the conventional one. The analytical solutions illustrate that the IRMS monotonically increases with increased stiffness ratio of the power arm (SRPA) but decreases with increased stiffness ratio of the resistance arm (SRRA). Therefore, three types of gyro structures with different stiffness ratios are designed. The mechanical sensitivities increased by 79.10%, 81.33% and 68.06% by theoretical calculation. Additionally, FEM simulation demonstrates that the mechanical sensitivity of the design is in accord with theoretical results. The linearity of design is analyzed, too. Consequently, the proposed new anchored leverage mechanism TFG offers a higher displacement output of sense mode to improve the mechanical sensitivity. |
| first_indexed | 2024-04-13T08:25:42Z |
| format | Article |
| id | doaj.art-674ba2d1b48f4acf909447dabe8c387b |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-13T08:25:42Z |
| publishDate | 2019-08-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-674ba2d1b48f4acf909447dabe8c387b2022-12-22T02:54:29ZengMDPI AGSensors1424-82202019-08-011916345510.3390/s19163455s19163455Design and Mechanical Sensitivity Analysis of a MEMS Tuning Fork Gyroscope with an Anchored Leverage MechanismZezhang Li0Shiqiao Gao1Lei Jin2Haipeng Liu3Yanwei Guan4Shigang Peng5State Key Laboratory of Explosion Science and Technology, Beijing Institute of Technology, Beijing 100081, ChinaState Key Laboratory of Explosion Science and Technology, Beijing Institute of Technology, Beijing 100081, ChinaSchool of Mechatronical Engineering, Beijing Institute of Technology, Beijing 100081, ChinaState Key Laboratory of Explosion Science and Technology, Beijing Institute of Technology, Beijing 100081, ChinaBeijing Institute of Control and Electronic Technology, Beijing 100038, ChinaState Key Laboratory of Explosion Science and Technology, Beijing Institute of Technology, Beijing 100081, ChinaThis paper presents the design and analysis of a new micro-electro-mechanical system (MEMS) tuning fork gyroscope (TFG), which can effectively improve the mechanical sensitivity of the gyroscope sense-mode by the designed leverage mechanism. A micromachined TFG with an anchored leverage mechanism is designed. The dynamics and mechanical sensitivity of the design are theoretically analyzed. The improvement rate of mechanical sensitivity (IRMS) is introduced to represent the optimization effect of the new structure compared with the conventional one. The analytical solutions illustrate that the IRMS monotonically increases with increased stiffness ratio of the power arm (SRPA) but decreases with increased stiffness ratio of the resistance arm (SRRA). Therefore, three types of gyro structures with different stiffness ratios are designed. The mechanical sensitivities increased by 79.10%, 81.33% and 68.06% by theoretical calculation. Additionally, FEM simulation demonstrates that the mechanical sensitivity of the design is in accord with theoretical results. The linearity of design is analyzed, too. Consequently, the proposed new anchored leverage mechanism TFG offers a higher displacement output of sense mode to improve the mechanical sensitivity.https://www.mdpi.com/1424-8220/19/16/3455mechanical sensitivitytuning fork gyroscopeanchored leverage mechanismstiffness ratiocoordinate transformation method |
| spellingShingle | Zezhang Li Shiqiao Gao Lei Jin Haipeng Liu Yanwei Guan Shigang Peng Design and Mechanical Sensitivity Analysis of a MEMS Tuning Fork Gyroscope with an Anchored Leverage Mechanism Sensors mechanical sensitivity tuning fork gyroscope anchored leverage mechanism stiffness ratio coordinate transformation method |
| title | Design and Mechanical Sensitivity Analysis of a MEMS Tuning Fork Gyroscope with an Anchored Leverage Mechanism |
| title_full | Design and Mechanical Sensitivity Analysis of a MEMS Tuning Fork Gyroscope with an Anchored Leverage Mechanism |
| title_fullStr | Design and Mechanical Sensitivity Analysis of a MEMS Tuning Fork Gyroscope with an Anchored Leverage Mechanism |
| title_full_unstemmed | Design and Mechanical Sensitivity Analysis of a MEMS Tuning Fork Gyroscope with an Anchored Leverage Mechanism |
| title_short | Design and Mechanical Sensitivity Analysis of a MEMS Tuning Fork Gyroscope with an Anchored Leverage Mechanism |
| title_sort | design and mechanical sensitivity analysis of a mems tuning fork gyroscope with an anchored leverage mechanism |
| topic | mechanical sensitivity tuning fork gyroscope anchored leverage mechanism stiffness ratio coordinate transformation method |
| url | https://www.mdpi.com/1424-8220/19/16/3455 |
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