Wafer-Scale ALD Synthesis of MoO<sub>3</sub> Sulfurized to MoS<sub>2</sub>

Wafer-Scale ALD Synthesis of MoO<sub>3</sub> Sulfurized to MoS<sub>2</sub>

Silicon has dimensional limitations in following Moore’s law; thus, new 2D materials complementing Silicon are being researched. Molybdenum disulfide (MoS<sub>2</sub>) is a prospective material anticipated to bridge the gap to complement Silicon and enhance the performances of semiconduc...

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Bibliographic Details
Main Authors: Sachin Shendokar, Moha Feroz Hossen, Shyam Aravamudhan
Format: Article
Language:English
Published: MDPI AG 2024-07-01
Series:Crystals
Subjects:
silicon limitations
2D materials
Molybdenum disulfide (MoS<sub>2</sub>)
Molybdenum trioxide (MoO<sub>3</sub>)
atomic layer deposition (ALD)
chemical vapor deposition (CVD)
Online Access:https://www.mdpi.com/2073-4352/14/8/673

Internet

https://www.mdpi.com/2073-4352/14/8/673

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