Fiber fabry-pero micro pressure sensor
A new fiber fabry-perot pressure sensor is designed. It is made by photolithography, silicon wafer etching, anode bonding, microelectromechanical system technology and so on. It is suitable for the pressure measurement of micro-pressure environment under harsh environment and small space. The struct...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2017-01-01
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| Series: | MATEC Web of Conferences |
| Subjects: | |
| Online Access: | https://doi.org/10.1051/matecconf/201713900200 |