Mechanical Behavior Investigation of 4H-SiC Single Crystal at the Micro–Nano Scale

In this paper, theoretical models of the critical indentation depth and critical force on brittle materials using cleavage strength and contact theory are proposed. A Berkovich indenter is adopted for nanoindentation tests on a 4H-SiC single crystal sample to evaluate its mechanical behaviors. The s...

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Bibliographic Details
Main Authors: Peng Chai, Shujuan Li, Yan Li, Lie Liang, Xincheng Yin
Format: Article
Language:English
Published: MDPI AG 2020-01-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/11/1/102