Microwave Whispering-Gallery-Mode Photoconductivity Measurement of Recombination Lifetime in Silicon
We present a whispering-gallery-mode resonance-enhanced microwave-detected photoconductivity-decay method for contactless measurement of recombination lifetime in highresistivity semiconductor layers. We applied the method to undoped Silicon wafers of high resistivity at 5 and 30 kOhm*cm and measure...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
Advanced Electromagnetics
2019-05-01
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Series: | Advanced Electromagnetics |
Subjects: | |
Online Access: | https://aemjournal.org/index.php/AEM/article/view/1127 |