Microwave Whispering-Gallery-Mode Photoconductivity Measurement of Recombination Lifetime in Silicon
We present a whispering-gallery-mode resonance-enhanced microwave-detected photoconductivity-decay method for contactless measurement of recombination lifetime in highresistivity semiconductor layers. We applied the method to undoped Silicon wafers of high resistivity at 5 and 30 kOhm*cm and measure...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Advanced Electromagnetics
2019-05-01
|
| Series: | Advanced Electromagnetics |
| Subjects: | |
| Online Access: | https://aemjournal.org/index.php/AEM/article/view/1127 |
| Summary: | We present a whispering-gallery-mode resonance-enhanced microwave-detected photoconductivity-decay method for contactless measurement of recombination lifetime in highresistivity semiconductor layers. We applied the method to undoped Silicon wafers of high resistivity at 5 and 30 kOhm*cm and measured the conductivity relaxation times of 10 and 14 microseconds, respectively. In wafers being considered, they are supposed to be defined by the electron-hole diffusion from the bulk to the wafer surfaces. |
|---|---|
| ISSN: | 2119-0275 |