Microwave Whispering-Gallery-Mode Photoconductivity Measurement of Recombination Lifetime in Silicon
We present a whispering-gallery-mode resonance-enhanced microwave-detected photoconductivity-decay method for contactless measurement of recombination lifetime in highresistivity semiconductor layers. We applied the method to undoped Silicon wafers of high resistivity at 5 and 30 kOhm*cm and measure...
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Format: | Article |
Language: | English |
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Advanced Electromagnetics
2019-05-01
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Series: | Advanced Electromagnetics |
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Online Access: | https://aemjournal.org/index.php/AEM/article/view/1127 |
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author | V. Yurchenko T. S. Navruz M. Ciydem A. Altintas |
author_facet | V. Yurchenko T. S. Navruz M. Ciydem A. Altintas |
author_sort | V. Yurchenko |
collection | DOAJ |
description | We present a whispering-gallery-mode resonance-enhanced microwave-detected photoconductivity-decay method for contactless measurement of recombination lifetime in highresistivity semiconductor layers. We applied the method to undoped Silicon wafers of high resistivity at 5 and 30 kOhm*cm and measured the conductivity relaxation times of 10 and 14 microseconds, respectively. In wafers being considered, they are supposed to be defined by the electron-hole diffusion from the bulk to the wafer surfaces. |
first_indexed | 2024-04-12T19:51:03Z |
format | Article |
id | doaj.art-67a05492d57b45fb9b1cbc32b1b79387 |
institution | Directory Open Access Journal |
issn | 2119-0275 |
language | English |
last_indexed | 2024-04-12T19:51:03Z |
publishDate | 2019-05-01 |
publisher | Advanced Electromagnetics |
record_format | Article |
series | Advanced Electromagnetics |
spelling | doaj.art-67a05492d57b45fb9b1cbc32b1b793872022-12-22T03:18:49ZengAdvanced ElectromagneticsAdvanced Electromagnetics2119-02752019-05-018210110710.7716/aem.v8i2.11271127Microwave Whispering-Gallery-Mode Photoconductivity Measurement of Recombination Lifetime in SiliconV. Yurchenko0T. S. Navruz1M. Ciydem2A. Altintas3Gazi UniversityGazi UniversityEngitek Engineering Technologies LtdBilkent UniversityWe present a whispering-gallery-mode resonance-enhanced microwave-detected photoconductivity-decay method for contactless measurement of recombination lifetime in highresistivity semiconductor layers. We applied the method to undoped Silicon wafers of high resistivity at 5 and 30 kOhm*cm and measured the conductivity relaxation times of 10 and 14 microseconds, respectively. In wafers being considered, they are supposed to be defined by the electron-hole diffusion from the bulk to the wafer surfaces.https://aemjournal.org/index.php/AEM/article/view/1127MicrowaveWhispering Gallery ModePhotoconductivityRecombinationSilicon |
spellingShingle | V. Yurchenko T. S. Navruz M. Ciydem A. Altintas Microwave Whispering-Gallery-Mode Photoconductivity Measurement of Recombination Lifetime in Silicon Advanced Electromagnetics Microwave Whispering Gallery Mode Photoconductivity Recombination Silicon |
title | Microwave Whispering-Gallery-Mode Photoconductivity Measurement of Recombination Lifetime in Silicon |
title_full | Microwave Whispering-Gallery-Mode Photoconductivity Measurement of Recombination Lifetime in Silicon |
title_fullStr | Microwave Whispering-Gallery-Mode Photoconductivity Measurement of Recombination Lifetime in Silicon |
title_full_unstemmed | Microwave Whispering-Gallery-Mode Photoconductivity Measurement of Recombination Lifetime in Silicon |
title_short | Microwave Whispering-Gallery-Mode Photoconductivity Measurement of Recombination Lifetime in Silicon |
title_sort | microwave whispering gallery mode photoconductivity measurement of recombination lifetime in silicon |
topic | Microwave Whispering Gallery Mode Photoconductivity Recombination Silicon |
url | https://aemjournal.org/index.php/AEM/article/view/1127 |
work_keys_str_mv | AT vyurchenko microwavewhisperinggallerymodephotoconductivitymeasurementofrecombinationlifetimeinsilicon AT tsnavruz microwavewhisperinggallerymodephotoconductivitymeasurementofrecombinationlifetimeinsilicon AT mciydem microwavewhisperinggallerymodephotoconductivitymeasurementofrecombinationlifetimeinsilicon AT aaltintas microwavewhisperinggallerymodephotoconductivitymeasurementofrecombinationlifetimeinsilicon |