Microwave Whispering-Gallery-Mode Photoconductivity Measurement of Recombination Lifetime in Silicon

We present a whispering-gallery-mode resonance-enhanced microwave-detected photoconductivity-decay method for contactless measurement of recombination lifetime in highresistivity semiconductor layers. We applied the method to undoped Silicon wafers of high resistivity at 5 and 30 kOhm*cm and measure...

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Main Authors: V. Yurchenko, T. S. Navruz, M. Ciydem, A. Altintas
Format: Article
Language:English
Published: Advanced Electromagnetics 2019-05-01
Series:Advanced Electromagnetics
Subjects:
Online Access:https://aemjournal.org/index.php/AEM/article/view/1127
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author V. Yurchenko
T. S. Navruz
M. Ciydem
A. Altintas
author_facet V. Yurchenko
T. S. Navruz
M. Ciydem
A. Altintas
author_sort V. Yurchenko
collection DOAJ
description We present a whispering-gallery-mode resonance-enhanced microwave-detected photoconductivity-decay method for contactless measurement of recombination lifetime in highresistivity semiconductor layers. We applied the method to undoped Silicon wafers of high resistivity at 5 and 30 kOhm*cm and measured the conductivity relaxation times of 10 and 14 microseconds, respectively. In wafers being considered, they are supposed to be defined by the electron-hole diffusion from the bulk to the wafer surfaces.
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spelling doaj.art-67a05492d57b45fb9b1cbc32b1b793872022-12-22T03:18:49ZengAdvanced ElectromagneticsAdvanced Electromagnetics2119-02752019-05-018210110710.7716/aem.v8i2.11271127Microwave Whispering-Gallery-Mode Photoconductivity Measurement of Recombination Lifetime in SiliconV. Yurchenko0T. S. Navruz1M. Ciydem2A. Altintas3Gazi UniversityGazi UniversityEngitek Engineering Technologies LtdBilkent UniversityWe present a whispering-gallery-mode resonance-enhanced microwave-detected photoconductivity-decay method for contactless measurement of recombination lifetime in highresistivity semiconductor layers. We applied the method to undoped Silicon wafers of high resistivity at 5 and 30 kOhm*cm and measured the conductivity relaxation times of 10 and 14 microseconds, respectively. In wafers being considered, they are supposed to be defined by the electron-hole diffusion from the bulk to the wafer surfaces.https://aemjournal.org/index.php/AEM/article/view/1127MicrowaveWhispering Gallery ModePhotoconductivityRecombinationSilicon
spellingShingle V. Yurchenko
T. S. Navruz
M. Ciydem
A. Altintas
Microwave Whispering-Gallery-Mode Photoconductivity Measurement of Recombination Lifetime in Silicon
Advanced Electromagnetics
Microwave
Whispering Gallery Mode
Photoconductivity
Recombination
Silicon
title Microwave Whispering-Gallery-Mode Photoconductivity Measurement of Recombination Lifetime in Silicon
title_full Microwave Whispering-Gallery-Mode Photoconductivity Measurement of Recombination Lifetime in Silicon
title_fullStr Microwave Whispering-Gallery-Mode Photoconductivity Measurement of Recombination Lifetime in Silicon
title_full_unstemmed Microwave Whispering-Gallery-Mode Photoconductivity Measurement of Recombination Lifetime in Silicon
title_short Microwave Whispering-Gallery-Mode Photoconductivity Measurement of Recombination Lifetime in Silicon
title_sort microwave whispering gallery mode photoconductivity measurement of recombination lifetime in silicon
topic Microwave
Whispering Gallery Mode
Photoconductivity
Recombination
Silicon
url https://aemjournal.org/index.php/AEM/article/view/1127
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AT tsnavruz microwavewhisperinggallerymodephotoconductivitymeasurementofrecombinationlifetimeinsilicon
AT mciydem microwavewhisperinggallerymodephotoconductivitymeasurementofrecombinationlifetimeinsilicon
AT aaltintas microwavewhisperinggallerymodephotoconductivitymeasurementofrecombinationlifetimeinsilicon