Microaccelerometer on Surface Acoustic Waves with a Ring Resonator on Anisotropic Material
Introduction. Diagnostic systems are designed to monitor the condition of operational components (for example, on the railway). It is imperative that micro-electromechanical systems (MEMS) equipped with acceleration sensors (accelerometers) be used as part of measuring diagnostic systems. It is know...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | Russian |
| Published: |
Saint Petersburg Electrotechnical University "LETI"
2019-12-01
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| Series: | Известия высших учебных заведений России: Радиоэлектроника |
| Subjects: | |
| Online Access: | https://re.eltech.ru/jour/article/view/381 |