Microaccelerometer on Surface Acoustic Waves with a Ring Resonator on Anisotropic Material

Microaccelerometer on Surface Acoustic Waves with a Ring Resonator on Anisotropic Material

Introduction. Diagnostic systems are designed to monitor the condition of operational components (for example, on the railway). It is imperative that micro-electromechanical systems (MEMS) equipped with acceleration sensors (accelerometers) be used as part of measuring diagnostic systems. It is know...

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Bibliographic Details
Main Authors:	Dmitry P. Lukyanov, Alexander M. Boronakhin, Sergey Yu. Shevchenko, Mariya A. Khivrich, Temurmalik A. Amirov
Format:	Article
Language:	Russian
Published:	Saint Petersburg Electrotechnical University "LETI" 2019-12-01
Series:	Известия высших учебных заведений России: Радиоэлектроника
Subjects:	микроэлектромеханические системы микромеханический акселерометр чувствительный элемент поверхностно-акустические волны встречно-штыревой преобразователь анизотропный материал
Online Access:	https://re.eltech.ru/jour/article/view/381

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