Low-loss multilayer compatible a-Si:H optical thin films for photonic applications
This paper reports about hydrogenated amorphous silicon which can be employed as low-loss optical material for small footprint and cost-effective photonic integrated circuits. Basic waveguides, photonic wire based couplers, Mach-Zehnder interferometers, ring resonators and Mach-Zehnder assisted ring...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2012-01-01
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| Series: | Journal of the European Optical Society-Rapid Publications |
| Subjects: | |
| Online Access: | https://jeos.edpsciences.org/articles/jeos/pdf/2012/01/jeos20120712033.pdf |