A study on the Treatment of Hydrofluoric Acid Wastewater from Semiconductor Manufacturing Processes and the Possibility of Reuse of reclaimed water
Objectives By eliminating fluorine and other ions through precipitation of fluoride and UF, RO membrane filtration using the hydrofluoric acid wastewater generated from the semiconductor production processes, this study aimed to investigate the possibility of the reuse of the reclaimed wastewater fo...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Korean Society of Environmental Engineers
2022-06-01
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| Series: | 대한환경공학회지 |
| Subjects: | |
| Online Access: | http://www.jksee.or.kr/upload/pdf/KSEE-2022-44-6-189.pdf |