Hybrid Cell Structure for Wideband CMUT: Design Method and Characteristic Analysis

Hybrid Cell Structure for Wideband CMUT: Design Method and Characteristic Analysis

Capacitive micromachined ultrasonic transducer (CMUT) is an ultrasonic transducer based on the microelectromechanical system (MEMS). Wideband CMUT has good application prospects in ultrasonic imaging, ultrasonic identification, flow measurement, and nondestructive testing due to its excellent charac...

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Bibliographic Details
Main Authors: Hongliang Wang, Xiao Huang, Lijun Yu, Qi Ding, Hanqiang Zhang, Changde He, Wendong Zhang
Format: Article
Language:English
Published: MDPI AG 2021-09-01
Series:Micromachines
Subjects:
wideband CMUT
hybrid cell structure
characteristic analysis
Online Access:https://www.mdpi.com/2072-666X/12/10/1180

Internet

https://www.mdpi.com/2072-666X/12/10/1180

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