Simulation of FDSOI-ISFET with Tunable Sensitivity by Temperature and Dual-Gate Structure

This work investigates the different sensitivities of an ion-sensitive field-effect transistor (ISFET) based on fully depleted silicon-on-insulator (FDSOI). Using computer-aided design (TCAD) tools, the sensitivity of a single-gate FDSOI based ISFET (FDSOI-ISFET) at different temperatures and the ef...

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Main Authors: Hanbin Wang, Jinshun Bi, Mengxin Liu, Tingting Han
Format: Article
Language:English
Published: MDPI AG 2021-06-01
Series:Electronics
Subjects:
Online Access:https://www.mdpi.com/2079-9292/10/13/1585
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author Hanbin Wang
Jinshun Bi
Mengxin Liu
Tingting Han
author_facet Hanbin Wang
Jinshun Bi
Mengxin Liu
Tingting Han
author_sort Hanbin Wang
collection DOAJ
description This work investigates the different sensitivities of an ion-sensitive field-effect transistor (ISFET) based on fully depleted silicon-on-insulator (FDSOI). Using computer-aided design (TCAD) tools, the sensitivity of a single-gate FDSOI based ISFET (FDSOI-ISFET) at different temperatures and the effects of the planar dual-gate structure on the sensitivity are determined. It is found that the sensitivity increases linearly with increasing temperature, reaching 890 mV/pH at 75 °C. By using a dual-gate structure and adjusting the control gate voltage, the sensitivity can be reduced from 750 mV/pH at 0 V control gate voltage to 540 mV/pH at 1 V control gate voltage. The above sensitivity changes are produced because the Nernst limit changes with temperature or the electric field generated by different control gate voltages causes changes in the carrier movement. It is proved that a single FDSOI-ISFET can have adjustable sensitivity by adjusting the operating temperature or the control gate voltage of the dual-gate device.
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spelling doaj.art-68eaed08add74045b8c9aaf829c833c22023-11-22T02:30:35ZengMDPI AGElectronics2079-92922021-06-011013158510.3390/electronics10131585Simulation of FDSOI-ISFET with Tunable Sensitivity by Temperature and Dual-Gate StructureHanbin Wang0Jinshun Bi1Mengxin Liu2Tingting Han3Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, ChinaInstitute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, ChinaInstitute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, ChinaNanjing Electronic Equipment Institute, Nanjing 210007, ChinaThis work investigates the different sensitivities of an ion-sensitive field-effect transistor (ISFET) based on fully depleted silicon-on-insulator (FDSOI). Using computer-aided design (TCAD) tools, the sensitivity of a single-gate FDSOI based ISFET (FDSOI-ISFET) at different temperatures and the effects of the planar dual-gate structure on the sensitivity are determined. It is found that the sensitivity increases linearly with increasing temperature, reaching 890 mV/pH at 75 °C. By using a dual-gate structure and adjusting the control gate voltage, the sensitivity can be reduced from 750 mV/pH at 0 V control gate voltage to 540 mV/pH at 1 V control gate voltage. The above sensitivity changes are produced because the Nernst limit changes with temperature or the electric field generated by different control gate voltages causes changes in the carrier movement. It is proved that a single FDSOI-ISFET can have adjustable sensitivity by adjusting the operating temperature or the control gate voltage of the dual-gate device.https://www.mdpi.com/2079-9292/10/13/1585ISFETsFDSOIssensitivitydual-gateTCAD simulation
spellingShingle Hanbin Wang
Jinshun Bi
Mengxin Liu
Tingting Han
Simulation of FDSOI-ISFET with Tunable Sensitivity by Temperature and Dual-Gate Structure
Electronics
ISFETs
FDSOIs
sensitivity
dual-gate
TCAD simulation
title Simulation of FDSOI-ISFET with Tunable Sensitivity by Temperature and Dual-Gate Structure
title_full Simulation of FDSOI-ISFET with Tunable Sensitivity by Temperature and Dual-Gate Structure
title_fullStr Simulation of FDSOI-ISFET with Tunable Sensitivity by Temperature and Dual-Gate Structure
title_full_unstemmed Simulation of FDSOI-ISFET with Tunable Sensitivity by Temperature and Dual-Gate Structure
title_short Simulation of FDSOI-ISFET with Tunable Sensitivity by Temperature and Dual-Gate Structure
title_sort simulation of fdsoi isfet with tunable sensitivity by temperature and dual gate structure
topic ISFETs
FDSOIs
sensitivity
dual-gate
TCAD simulation
url https://www.mdpi.com/2079-9292/10/13/1585
work_keys_str_mv AT hanbinwang simulationoffdsoiisfetwithtunablesensitivitybytemperatureanddualgatestructure
AT jinshunbi simulationoffdsoiisfetwithtunablesensitivitybytemperatureanddualgatestructure
AT mengxinliu simulationoffdsoiisfetwithtunablesensitivitybytemperatureanddualgatestructure
AT tingtinghan simulationoffdsoiisfetwithtunablesensitivitybytemperatureanddualgatestructure