LORENTZ KUVVETİ TABANLI, TINLAYAN ve TİTREŞİM GENLİĞİ ÖLÇÜMÜ İLE ÇALIŞAN BİR MEMS MANYETOMETRE

LORENTZ KUVVETİ TABANLI, TINLAYAN ve TİTREŞİM GENLİĞİ ÖLÇÜMÜ İLE ÇALIŞAN BİR MEMS MANYETOMETRE

Bu çalışmada titreşim genliği ölçümü ile çalışan Lorentz kuvveti tabanlı ve algılayıcısı tınlaşan MEMS yük hücresi olan bir manyetometre sunulmaktadır. Manyetometre, tarak elektrotlara sahip Çift Bağlı Diyapazon (ÇBD) bir tınlatıcı ile, uçlarından ve ortalarından birbirlerine bağlanmış kirişlerden o...

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Bibliographic Details
Main Author:	Kıvanç Azgın
Format:	Article
Language:	English
Published:	Bursa Uludag University 2017-12-01
Series:	Uludağ University Journal of The Faculty of Engineering
Subjects:	magnetometer detf mems lorentz force amplitude detection manyetometre çbd (çift bağlı diyapazon) lorentz kuvveti genlik ölçüm
Online Access:	https://dergipark.org.tr/tr/pub/uumfd/issue/31375/325923

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