Proposal of Physics-Based Equivalent Circuit of Pseudo-MOS Capacitor Structure for Impedance Spectroscopy

This paper proposes a detailed equivalent circuit of the pseudo-MOS capacitor structure and subjects it to impedance spectroscopy. We find, using Cole–Cole plots, that three resistance components, which correspond to interface traps, contact resistance, and bulk traps created near the con...

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Bibliographic Details
Main Authors: Isao Yarita, Shingo Sato, Yasuhisa Omura
Format: Article
Language:English
Published: IEEE 2016-01-01
Series:IEEE Journal of the Electron Devices Society
Subjects:
Online Access:https://ieeexplore.ieee.org/document/7457615/