Advanced characterization of by-product carbon film obtained by thermal chemical vapor deposition during CNT manufacturing
This study is focused on the investigation of the morphology and the characteristics of carbon films, obtained by thermal chemical vapor deposition (T-CVD) on different substrates, during carbon nanotubes (CNTs) manufacturing. These films were examined, by means of optical and electronic microscopy,...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
EDP Sciences
2017-01-01
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Series: | Manufacturing Review |
Subjects: | |
Online Access: | https://doi.org/10.1051/mfreview/2017006 |