Advanced characterization of by-product carbon film obtained by thermal chemical vapor deposition during CNT manufacturing

This study is focused on the investigation of the morphology and the characteristics of carbon films, obtained by thermal chemical vapor deposition (T-CVD) on different substrates, during carbon nanotubes (CNTs) manufacturing. These films were examined, by means of optical and electronic microscopy,...

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Main Authors: Trompeta Aikaterini-Flora A., Koumoulos Elias P., Kartsonakis Ioannis A., Charitidis Costas A.
Format: Article
Language:English
Published: EDP Sciences 2017-01-01
Series:Manufacturing Review
Subjects:
Online Access:https://doi.org/10.1051/mfreview/2017006
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author Trompeta Aikaterini-Flora A.
Koumoulos Elias P.
Kartsonakis Ioannis A.
Charitidis Costas A.
author_facet Trompeta Aikaterini-Flora A.
Koumoulos Elias P.
Kartsonakis Ioannis A.
Charitidis Costas A.
author_sort Trompeta Aikaterini-Flora A.
collection DOAJ
description This study is focused on the investigation of the morphology and the characteristics of carbon films, obtained by thermal chemical vapor deposition (T-CVD) on different substrates, during carbon nanotubes (CNTs) manufacturing. These films were examined, by means of optical and electronic microscopy, X-ray photoelectron spectroscopy and Raman spectroscopy. Additional measurements were conducted related with the estimation of their nanomechanical properties. The topography is studied, in combination with the assessment of their mechanical behavior at nanoscale. Through nanoindentation, hardness and elastic modulus together with wear resistance index (H/E) were evaluated. According to this study, it may be remarked that the obtained film is classified as an amorphous carbon film.
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spelling doaj.art-6a290320dbf64491bb6c0dfcc96c42172022-12-22T02:03:16ZengEDP SciencesManufacturing Review2265-42242017-01-014710.1051/mfreview/2017006mfreview160018Advanced characterization of by-product carbon film obtained by thermal chemical vapor deposition during CNT manufacturingTrompeta Aikaterini-Flora A.Koumoulos Elias P.Kartsonakis Ioannis A.Charitidis Costas A.This study is focused on the investigation of the morphology and the characteristics of carbon films, obtained by thermal chemical vapor deposition (T-CVD) on different substrates, during carbon nanotubes (CNTs) manufacturing. These films were examined, by means of optical and electronic microscopy, X-ray photoelectron spectroscopy and Raman spectroscopy. Additional measurements were conducted related with the estimation of their nanomechanical properties. The topography is studied, in combination with the assessment of their mechanical behavior at nanoscale. Through nanoindentation, hardness and elastic modulus together with wear resistance index (H/E) were evaluated. According to this study, it may be remarked that the obtained film is classified as an amorphous carbon film.https://doi.org/10.1051/mfreview/2017006Carbon coatingsThin filmsChemical vapor depositionAdvanced characterizationNanomechanical properties
spellingShingle Trompeta Aikaterini-Flora A.
Koumoulos Elias P.
Kartsonakis Ioannis A.
Charitidis Costas A.
Advanced characterization of by-product carbon film obtained by thermal chemical vapor deposition during CNT manufacturing
Manufacturing Review
Carbon coatings
Thin films
Chemical vapor deposition
Advanced characterization
Nanomechanical properties
title Advanced characterization of by-product carbon film obtained by thermal chemical vapor deposition during CNT manufacturing
title_full Advanced characterization of by-product carbon film obtained by thermal chemical vapor deposition during CNT manufacturing
title_fullStr Advanced characterization of by-product carbon film obtained by thermal chemical vapor deposition during CNT manufacturing
title_full_unstemmed Advanced characterization of by-product carbon film obtained by thermal chemical vapor deposition during CNT manufacturing
title_short Advanced characterization of by-product carbon film obtained by thermal chemical vapor deposition during CNT manufacturing
title_sort advanced characterization of by product carbon film obtained by thermal chemical vapor deposition during cnt manufacturing
topic Carbon coatings
Thin films
Chemical vapor deposition
Advanced characterization
Nanomechanical properties
url https://doi.org/10.1051/mfreview/2017006
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AT koumouloseliasp advancedcharacterizationofbyproductcarbonfilmobtainedbythermalchemicalvapordepositionduringcntmanufacturing
AT kartsonakisioannisa advancedcharacterizationofbyproductcarbonfilmobtainedbythermalchemicalvapordepositionduringcntmanufacturing
AT charitidiscostasa advancedcharacterizationofbyproductcarbonfilmobtainedbythermalchemicalvapordepositionduringcntmanufacturing