Advanced characterization of by-product carbon film obtained by thermal chemical vapor deposition during CNT manufacturing
This study is focused on the investigation of the morphology and the characteristics of carbon films, obtained by thermal chemical vapor deposition (T-CVD) on different substrates, during carbon nanotubes (CNTs) manufacturing. These films were examined, by means of optical and electronic microscopy,...
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Format: | Article |
Language: | English |
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EDP Sciences
2017-01-01
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Series: | Manufacturing Review |
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Online Access: | https://doi.org/10.1051/mfreview/2017006 |
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author | Trompeta Aikaterini-Flora A. Koumoulos Elias P. Kartsonakis Ioannis A. Charitidis Costas A. |
author_facet | Trompeta Aikaterini-Flora A. Koumoulos Elias P. Kartsonakis Ioannis A. Charitidis Costas A. |
author_sort | Trompeta Aikaterini-Flora A. |
collection | DOAJ |
description | This study is focused on the investigation of the morphology and the characteristics of carbon films, obtained by thermal chemical vapor deposition (T-CVD) on different substrates, during carbon nanotubes (CNTs) manufacturing. These films were examined, by means of optical and electronic microscopy, X-ray photoelectron spectroscopy and Raman spectroscopy. Additional measurements were conducted related with the estimation of their nanomechanical properties. The topography is studied, in combination with the assessment of their mechanical behavior at nanoscale. Through nanoindentation, hardness and elastic modulus together with wear resistance index (H/E) were evaluated. According to this study, it may be remarked that the obtained film is classified as an amorphous carbon film. |
first_indexed | 2024-12-10T03:50:12Z |
format | Article |
id | doaj.art-6a290320dbf64491bb6c0dfcc96c4217 |
institution | Directory Open Access Journal |
issn | 2265-4224 |
language | English |
last_indexed | 2024-12-10T03:50:12Z |
publishDate | 2017-01-01 |
publisher | EDP Sciences |
record_format | Article |
series | Manufacturing Review |
spelling | doaj.art-6a290320dbf64491bb6c0dfcc96c42172022-12-22T02:03:16ZengEDP SciencesManufacturing Review2265-42242017-01-014710.1051/mfreview/2017006mfreview160018Advanced characterization of by-product carbon film obtained by thermal chemical vapor deposition during CNT manufacturingTrompeta Aikaterini-Flora A.Koumoulos Elias P.Kartsonakis Ioannis A.Charitidis Costas A.This study is focused on the investigation of the morphology and the characteristics of carbon films, obtained by thermal chemical vapor deposition (T-CVD) on different substrates, during carbon nanotubes (CNTs) manufacturing. These films were examined, by means of optical and electronic microscopy, X-ray photoelectron spectroscopy and Raman spectroscopy. Additional measurements were conducted related with the estimation of their nanomechanical properties. The topography is studied, in combination with the assessment of their mechanical behavior at nanoscale. Through nanoindentation, hardness and elastic modulus together with wear resistance index (H/E) were evaluated. According to this study, it may be remarked that the obtained film is classified as an amorphous carbon film.https://doi.org/10.1051/mfreview/2017006Carbon coatingsThin filmsChemical vapor depositionAdvanced characterizationNanomechanical properties |
spellingShingle | Trompeta Aikaterini-Flora A. Koumoulos Elias P. Kartsonakis Ioannis A. Charitidis Costas A. Advanced characterization of by-product carbon film obtained by thermal chemical vapor deposition during CNT manufacturing Manufacturing Review Carbon coatings Thin films Chemical vapor deposition Advanced characterization Nanomechanical properties |
title | Advanced characterization of by-product carbon film obtained by thermal chemical vapor deposition during CNT manufacturing |
title_full | Advanced characterization of by-product carbon film obtained by thermal chemical vapor deposition during CNT manufacturing |
title_fullStr | Advanced characterization of by-product carbon film obtained by thermal chemical vapor deposition during CNT manufacturing |
title_full_unstemmed | Advanced characterization of by-product carbon film obtained by thermal chemical vapor deposition during CNT manufacturing |
title_short | Advanced characterization of by-product carbon film obtained by thermal chemical vapor deposition during CNT manufacturing |
title_sort | advanced characterization of by product carbon film obtained by thermal chemical vapor deposition during cnt manufacturing |
topic | Carbon coatings Thin films Chemical vapor deposition Advanced characterization Nanomechanical properties |
url | https://doi.org/10.1051/mfreview/2017006 |
work_keys_str_mv | AT trompetaaikaterinifloraa advancedcharacterizationofbyproductcarbonfilmobtainedbythermalchemicalvapordepositionduringcntmanufacturing AT koumouloseliasp advancedcharacterizationofbyproductcarbonfilmobtainedbythermalchemicalvapordepositionduringcntmanufacturing AT kartsonakisioannisa advancedcharacterizationofbyproductcarbonfilmobtainedbythermalchemicalvapordepositionduringcntmanufacturing AT charitidiscostasa advancedcharacterizationofbyproductcarbonfilmobtainedbythermalchemicalvapordepositionduringcntmanufacturing |