Microcantilever Displacement Measurement Using a Mechanically Modulated Optical Feedback Interferometer

Microcantilever Displacement Measurement Using a Mechanically Modulated Optical Feedback Interferometer

Microcantilever motion detection is a useful tool for the characterization of the physical, chemical and biological properties of materials. In the past, different approaches have been proposed and tested to enhance the behavior, size and simplicity of microcantilever motion detectors. In this paper...

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Bibliographic Details
Main Authors: Francisco J. Azcona, Ajit Jha, Carlos Yáñez, Reza Atashkhooei, Santiago Royo
Format: Article
Language:English
Published: MDPI AG 2016-06-01
Series:Sensors
Subjects:
optical feedback interferometry
displacement measurement
nanometric resolution
atomic force microscopy
Online Access:http://www.mdpi.com/1424-8220/16/7/997

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http://www.mdpi.com/1424-8220/16/7/997

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