Semi-Automated Extraction of the Distribution of Single Defects for nMOS Transistors

Miniaturization of metal-oxide-semiconductor field effect transistors (MOSFETs) is typically beneficial for their operating characteristics, such as switching speed and power consumption, but at the same time miniaturization also leads to increased variability among nominally identical devices. Adve...

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Bibliographic Details
Main Authors: Bernhard Stampfer, Franz Schanovsky, Tibor Grasser, Michael Waltl
Format: Article
Language:English
Published: MDPI AG 2020-04-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/11/4/446