Semi-Automated Extraction of the Distribution of Single Defects for nMOS Transistors
Miniaturization of metal-oxide-semiconductor field effect transistors (MOSFETs) is typically beneficial for their operating characteristics, such as switching speed and power consumption, but at the same time miniaturization also leads to increased variability among nominally identical devices. Adve...
Main Authors: | Bernhard Stampfer, Franz Schanovsky, Tibor Grasser, Michael Waltl |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2020-04-01
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Series: | Micromachines |
Subjects: | |
Online Access: | https://www.mdpi.com/2072-666X/11/4/446 |
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