The Effect of Thermal Annealing on Structural, Morphological and Optical Features of BaTiO3 Thin Film assisted by e-beam PVD Technique
The work reported in this paper was focused on the investigation of surface morphological, microstructural, and optical features of polycrystalline BaTiO3 thin film deposited on p-type Si < 100 > substrate using e-beam PVD (physical vapor deposition) technique. The influence of annealing over...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
Iran University of Science & Technology
2021-06-01
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Series: | Iranian Journal of Materials Science and Engineering |
Subjects: | |
Online Access: | http://ijmse.iust.ac.ir/article-1-1879-en.html |