Structure and Property of Diamond-like Carbon Coating with Si and O Co-Doping Deposited by Reactive Magnetron Sputtering

Structure and Property of Diamond-like Carbon Coating with Si and O Co-Doping Deposited by Reactive Magnetron Sputtering

In this paper, diamond-like carbon (DLC) coatings with Si and O co-doping (Si/O-DLC) were deposited by reactive magnetron sputtering using a gas mixture of C<sub>2</sub>H<sub>2</sub>, O<sub>2</sub> and Ar to sputter a silicon/graphite splicing target. The O conten...

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Bibliographic Details
Main Authors: Wei Dai, Liang Wu, Qimin Wang
Format: Article
Language:English
Published: MDPI AG 2023-05-01
Series:Journal of Composites Science
Subjects:
diamond-like carbon
doping
mechanical property
tribology
resistivity
Online Access:https://www.mdpi.com/2504-477X/7/5/180

Internet

https://www.mdpi.com/2504-477X/7/5/180

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