Pressure Transducer Optimization by Multiphysics Simulation

Pressure sensors are used in a wide range of applications with a significant market share in the industrial sector. The piezoresistive pressure sensor is quite popular due to its low production cost. It is normally made up of sensing elements attached to a deformation membrane. The analysis of the m...

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Bibliographic Details
Main Authors: Ricardo PEREIRA, Carlos CIMA
Format: Article
Language:English
Published: IFSA Publishing, S.L. 2021-03-01
Series:Sensors & Transducers
Subjects:
Online Access:https://sensorsportal.com/HTML/DIGEST/march_2021/Vol_250/P_3214.pdf