Microelectromechanical Resonant Accelerometer Designed with a High Sensitivity

Microelectromechanical Resonant Accelerometer Designed with a High Sensitivity

This paper describes the design and experimental evaluation of a silicon micro-machined resonant accelerometer (SMRA). This type of accelerometer works on the principle that a proof mass under acceleration applies force to two double-ended tuning fork (DETF) resonators, and the frequency output of t...

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Bibliographic Details
Main Authors: Jing Zhang, Yan Su, Qin Shi, An-Ping Qiu
Format: Article
Language:English
Published: MDPI AG 2015-12-01
Series:Sensors
Subjects:
resonant accelerometer
SOI
micro-lever mechanism
sensitivity
MEMS
Online Access:http://www.mdpi.com/1424-8220/15/12/29803

Internet

http://www.mdpi.com/1424-8220/15/12/29803

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