Design of Versatile Top‐Down Transfer by Thermal Release Tape/Poly(methyl methacrylate) (TRT/PMMA) Bi‐Supporting Layers Toward All‐Transfer Transition Metal Dichalcogenide Material Based Transistor Arrays

Design of Versatile Top‐Down Transfer by Thermal Release Tape/Poly(methyl methacrylate) (TRT/PMMA) Bi‐Supporting Layers Toward All‐Transfer Transition Metal Dichalcogenide Material Based Transistor Arrays

A top‐down transfer process is developed via a rolling process associated with thermal release tape/poly(methyl methacrylate) (PMMA) bi‐supporting layers to realize large‐scale transfer processes on transition metal dichalcogenide materials. A 2‐inch MoS2 thin film transferred on SiO2/Si substrates...

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Bibliographic Details
Main Authors: Ying-Chun Shen, Bang-Kai Wu, Tsung-Shun Tsai, Mingjin Liu, Jyun-Hong Chen, Tzu-Yi Yang, Ruei-Hong Cyu, Chieh-Ting Chen, Yu-Chieh Hsu, Chai-Hung Luo, Yu-Qi Huang, Yu-Ren Peng, Chang-Hong Shen, Yen-Fu Lin, Po-Wen Chiu, Ya-Chin King, Yu-Lun Chueh
Format: Article
Language:English
Published: Wiley-VCH 2024-02-01
Series:Small Science
Subjects:
electrode transfer
large-scale transfers
selective transfer
top-down transfer
transition metal dichalcogenides materials
Online Access:https://doi.org/10.1002/smsc.202300144

Internet

https://doi.org/10.1002/smsc.202300144

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