Planar microplasma optical emission gas spectroscopy based on selective growth of ZnO nanowires
Abstract The present study demonstrates a novel miniature planar device by the selective growth of ZnO nanowires for microplasma optical emission gas spectroscopy. Gold electrodes are fabricated on the silicon substrate by thermal evaporation and photolithography process with a 15 μm gap size. Zinc...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2022-06-01
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| Series: | Micro & Nano Letters |
| Online Access: | https://doi.org/10.1049/mna2.12118 |