Sputter-deposition of ultra-thin film stacks from EUROFER97 and tungsten: characterisation and interaction with low-energy D and He ions
We have sputter-deposited stacks of ultrathin layers from EUROFER97 and tungsten on silicon substrates. Ion beam analysis techniques are used for composition characterisation and microscopy methods are employed for structural examination. The films are subsequently studied by time-of-flight low-ener...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IOP Publishing
2024-01-01
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| Series: | Materials Research Express |
| Subjects: | |
| Online Access: | https://doi.org/10.1088/2053-1591/ad1f97 |