Influence of Permanent Magnetic Properties on Laser-Assisted Heating Magnetization for Magnetic MEMS
When magnetic microelectromechanical systems (MEMS) devices utilize thin- or thick-film permanent magnets, the uniform magnetization of these magnets, owing to their flat-shape, generate a strong antimagnetic field and weak surface magnetic flux density. This study proposes a laser-assisted micro mu...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2023-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/10354321/ |