Enhanced thermal sensitivity of MEMS bolometers integrated with nanometer-scale hole array structures

Enhanced thermal sensitivity of MEMS bolometers integrated with nanometer-scale hole array structures

We have fabricated two-dimensional nanometer-scale hole array structures on GaAs doubly-clamped microelectromechanical system (MEMS) beam resonators to modulate their thermal properties. Owing to the reduction in the thermal conductance of the MEMS beams by introducing the hole array structures, the...

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Bibliographic Details
Main Authors: Ya Zhang, Boqi Qiu, Naomi Nagai, Masahiro Nomura, Sebastian Volz, Kazuhiko Hirakawa
Format: Article
Language:English
Published: AIP Publishing LLC 2019-08-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/1.5113521

Internet

http://dx.doi.org/10.1063/1.5113521

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