Enhanced thermal sensitivity of MEMS bolometers integrated with nanometer-scale hole array structures
We have fabricated two-dimensional nanometer-scale hole array structures on GaAs doubly-clamped microelectromechanical system (MEMS) beam resonators to modulate their thermal properties. Owing to the reduction in the thermal conductance of the MEMS beams by introducing the hole array structures, the...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2019-08-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.5113521 |
| _version_ | 1818550337064140800 |
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| author | Ya Zhang Boqi Qiu Naomi Nagai Masahiro Nomura Sebastian Volz Kazuhiko Hirakawa |
| author_facet | Ya Zhang Boqi Qiu Naomi Nagai Masahiro Nomura Sebastian Volz Kazuhiko Hirakawa |
| author_sort | Ya Zhang |
| collection | DOAJ |
| description | We have fabricated two-dimensional nanometer-scale hole array structures on GaAs doubly-clamped microelectromechanical system (MEMS) beam resonators to modulate their thermal properties. Owing to the reduction in the thermal conductance of the MEMS beams by introducing the hole array structures, the nano-porous MEMS bolometers show 2-3 times larger thermal sensitivities than the unpatterned reference sample. Furthermore, since the heat capacitance of the MEMS beams is also reduced by introducing the hole array, the thermal decay time of the patterned MEMS beams is increased only by about 30-50%, demonstrating the effectiveness of the hole array structures for enhancing the thermal sensitivities of bolometers without significantly deteriorating their operation bandwidths. |
| first_indexed | 2024-12-12T08:45:06Z |
| format | Article |
| id | doaj.art-6c235aeca5a847bab62a3745ca2496b2 |
| institution | Directory Open Access Journal |
| issn | 2158-3226 |
| language | English |
| last_indexed | 2024-12-12T08:45:06Z |
| publishDate | 2019-08-01 |
| publisher | AIP Publishing LLC |
| record_format | Article |
| series | AIP Advances |
| spelling | doaj.art-6c235aeca5a847bab62a3745ca2496b22022-12-22T00:30:35ZengAIP Publishing LLCAIP Advances2158-32262019-08-0198085102085102-410.1063/1.5113521006908ADVEnhanced thermal sensitivity of MEMS bolometers integrated with nanometer-scale hole array structuresYa Zhang0Boqi Qiu1Naomi Nagai2Masahiro Nomura3Sebastian Volz4Kazuhiko Hirakawa5Institute of Industrial Science, University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, JapanInstitute of Industrial Science, University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, JapanInstitute of Industrial Science, University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, JapanInstitute of Industrial Science, University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, JapanLIMMS/CNRS-IIS, UMI 2820, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, JapanInstitute of Industrial Science, University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, JapanWe have fabricated two-dimensional nanometer-scale hole array structures on GaAs doubly-clamped microelectromechanical system (MEMS) beam resonators to modulate their thermal properties. Owing to the reduction in the thermal conductance of the MEMS beams by introducing the hole array structures, the nano-porous MEMS bolometers show 2-3 times larger thermal sensitivities than the unpatterned reference sample. Furthermore, since the heat capacitance of the MEMS beams is also reduced by introducing the hole array, the thermal decay time of the patterned MEMS beams is increased only by about 30-50%, demonstrating the effectiveness of the hole array structures for enhancing the thermal sensitivities of bolometers without significantly deteriorating their operation bandwidths.http://dx.doi.org/10.1063/1.5113521 |
| spellingShingle | Ya Zhang Boqi Qiu Naomi Nagai Masahiro Nomura Sebastian Volz Kazuhiko Hirakawa Enhanced thermal sensitivity of MEMS bolometers integrated with nanometer-scale hole array structures AIP Advances |
| title | Enhanced thermal sensitivity of MEMS bolometers integrated with nanometer-scale hole array structures |
| title_full | Enhanced thermal sensitivity of MEMS bolometers integrated with nanometer-scale hole array structures |
| title_fullStr | Enhanced thermal sensitivity of MEMS bolometers integrated with nanometer-scale hole array structures |
| title_full_unstemmed | Enhanced thermal sensitivity of MEMS bolometers integrated with nanometer-scale hole array structures |
| title_short | Enhanced thermal sensitivity of MEMS bolometers integrated with nanometer-scale hole array structures |
| title_sort | enhanced thermal sensitivity of mems bolometers integrated with nanometer scale hole array structures |
| url | http://dx.doi.org/10.1063/1.5113521 |
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