Direct Wafer-Scale CVD Graphene Growth under Platinum Thin-Films

Since the transfer process of graphene from a dedicated growth substrate to another substrate is prone to induce defects and contamination and can increase costs, there is a large interest in methods for growing graphene directly on silicon wafers. Here, we demonstrate the direct CVD growth of graph...

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Bibliographic Details
Main Authors: Yelena Hagendoorn, Gregory Pandraud, Sten Vollebregt, Bruno Morana, Pasqualina M. Sarro, Peter G. Steeneken
Format: Article
Language:English
Published: MDPI AG 2022-05-01
Series:Materials
Subjects:
Online Access:https://www.mdpi.com/1996-1944/15/10/3723