Highly Accurate Analytical Approximate Solutions of the Electrostatically Actuated Parallel Plates
This paper is concerned with highly accurate analytical approximate solutions to dynamic oscillation of the parallel-plates model of an electrostatic micro-actuator. A potential difference is applied between the two electrodes to obtain a desired oscillatory effect, and the top movable electrode is...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2023-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/10217332/ |