Highly Accurate Analytical Approximate Solutions of the Electrostatically Actuated Parallel Plates
This paper is concerned with highly accurate analytical approximate solutions to dynamic oscillation of the parallel-plates model of an electrostatic micro-actuator. A potential difference is applied between the two electrodes to obtain a desired oscillatory effect, and the top movable electrode is...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
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IEEE
2023-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/10217332/ |
| _version_ | 1797738998564651008 |
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| author | W. J. Liu X. Q. Zhao |
| author_facet | W. J. Liu X. Q. Zhao |
| author_sort | W. J. Liu |
| collection | DOAJ |
| description | This paper is concerned with highly accurate analytical approximate solutions to dynamic oscillation of the parallel-plates model of an electrostatic micro-actuator. A potential difference is applied between the two electrodes to obtain a desired oscillatory effect, and the top movable electrode is suspended over the bottom fixed electrode by a linear suspension. The periodic oscillation solutions are obtained by generalizing the second-order Newton-harmonic balance (HB) method. The procedure obtains brief and accurate analytical approximate solutions for a large range of oscillation amplitudes with only one iteration step, the analytical approximate solutions show excellent agreement with the “exact” solution yielded by numerical integration. These analytical approximate solutions can be applied to analyze and design micro- and nano-devices employing electrostatic parallel plates. |
| first_indexed | 2024-03-12T13:51:57Z |
| format | Article |
| id | doaj.art-6c92743e79e94130af8770f93307eb26 |
| institution | Directory Open Access Journal |
| issn | 2169-3536 |
| language | English |
| last_indexed | 2024-03-12T13:51:57Z |
| publishDate | 2023-01-01 |
| publisher | IEEE |
| record_format | Article |
| series | IEEE Access |
| spelling | doaj.art-6c92743e79e94130af8770f93307eb262023-08-22T23:00:21ZengIEEEIEEE Access2169-35362023-01-0111879388794410.1109/ACCESS.2023.330545810217332Highly Accurate Analytical Approximate Solutions of the Electrostatically Actuated Parallel PlatesW. J. Liu0https://orcid.org/0000-0003-3570-6700X. Q. Zhao1https://orcid.org/0000-0002-7421-5544College of Mathematics and Computer, Jilin Normal University, Siping, ChinaCollege of Mathematics and Computer, Jilin Normal University, Siping, ChinaThis paper is concerned with highly accurate analytical approximate solutions to dynamic oscillation of the parallel-plates model of an electrostatic micro-actuator. A potential difference is applied between the two electrodes to obtain a desired oscillatory effect, and the top movable electrode is suspended over the bottom fixed electrode by a linear suspension. The periodic oscillation solutions are obtained by generalizing the second-order Newton-harmonic balance (HB) method. The procedure obtains brief and accurate analytical approximate solutions for a large range of oscillation amplitudes with only one iteration step, the analytical approximate solutions show excellent agreement with the “exact” solution yielded by numerical integration. These analytical approximate solutions can be applied to analyze and design micro- and nano-devices employing electrostatic parallel plates.https://ieeexplore.ieee.org/document/10217332/Parallel plateMEMSanalytical approximationsecond-order Newton iterationharmonic balance |
| spellingShingle | W. J. Liu X. Q. Zhao Highly Accurate Analytical Approximate Solutions of the Electrostatically Actuated Parallel Plates IEEE Access Parallel plate MEMS analytical approximation second-order Newton iteration harmonic balance |
| title | Highly Accurate Analytical Approximate Solutions of the Electrostatically Actuated Parallel Plates |
| title_full | Highly Accurate Analytical Approximate Solutions of the Electrostatically Actuated Parallel Plates |
| title_fullStr | Highly Accurate Analytical Approximate Solutions of the Electrostatically Actuated Parallel Plates |
| title_full_unstemmed | Highly Accurate Analytical Approximate Solutions of the Electrostatically Actuated Parallel Plates |
| title_short | Highly Accurate Analytical Approximate Solutions of the Electrostatically Actuated Parallel Plates |
| title_sort | highly accurate analytical approximate solutions of the electrostatically actuated parallel plates |
| topic | Parallel plate MEMS analytical approximation second-order Newton iteration harmonic balance |
| url | https://ieeexplore.ieee.org/document/10217332/ |
| work_keys_str_mv | AT wjliu highlyaccurateanalyticalapproximatesolutionsoftheelectrostaticallyactuatedparallelplates AT xqzhao highlyaccurateanalyticalapproximatesolutionsoftheelectrostaticallyactuatedparallelplates |