Design, Manufacture and Control of a Multi-layer Piezoelectric Actuator
A piezoelectric-based micro motion actuator is typically used in micro-scale movement technologies, with the actuator developed to deliver very small movements and high resolution for motion within several micrometer ranges. However, a significant challenge from the strong, nonlinear hysteresi...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Universitas Indonesia
2024-07-01
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| Series: | International Journal of Technology |
| Subjects: | |
| Online Access: | https://ijtech.eng.ui.ac.id/article/view/6605 |