Evolution of morphology and defects of graphene with growth parameters by PECVD
The morphology of graphene has an important impact on its applications such as sensing and energy storage. In this study, the evolution of the surface morphology and defect types of graphene that was directly grown on Al _2 O _3 by plasma enhanced chemical vapor deposition (PECVD) was investigated b...
| Main Authors: | , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
IOP Publishing
2020-01-01
|
| Series: | Materials Research Express |
| Subjects: | |
| Online Access: | https://doi.org/10.1088/2053-1591/ab80e8 |