Optical frequency comb generation with low temperature reactive sputtered silicon nitride waveguides
Integrated silicon nitride (SiN) waveguides with anomalous dispersion have the potential to bring practical nonlinear optics to mainstream photonic integrated circuits. However, high-stress and high-processing temperatures remain an obstacle to mass adoption. We report low-stress, high-confinement,...
| Main Authors: | , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2020-01-01
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| Series: | APL Photonics |
| Online Access: | http://dx.doi.org/10.1063/1.5136270 |