Biaxial Angular Acceleration Sensor with Rotational-Symmetric Spiral Channels and MEMS Piezoresistive Cantilevers
Angular acceleration sensors<b> </b>are attracting attention as sensors for monitoring rotational vibration. Many angular acceleration sensors have been developed; however, multiaxis measurement is still in a challenging stage. In this study, we propose a biaxial angular acceleration sen...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-04-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/12/5/507 |