Biaxial Angular Acceleration Sensor with Rotational-Symmetric Spiral Channels and MEMS Piezoresistive Cantilevers
Angular acceleration sensors<b> </b>are attracting attention as sensors for monitoring rotational vibration. Many angular acceleration sensors have been developed; however, multiaxis measurement is still in a challenging stage. In this study, we propose a biaxial angular acceleration sen...
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| Format: | Article |
| Language: | English |
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MDPI AG
2021-04-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/12/5/507 |
| _version_ | 1797535565734739968 |
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| author | Rihachiro Nakashima Hidetoshi Takahashi |
| author_facet | Rihachiro Nakashima Hidetoshi Takahashi |
| author_sort | Rihachiro Nakashima |
| collection | DOAJ |
| description | Angular acceleration sensors<b> </b>are attracting attention as sensors for monitoring rotational vibration. Many angular acceleration sensors have been developed; however, multiaxis measurement is still in a challenging stage. In this study, we propose a biaxial angular acceleration sensor with two uniaxial sensor units arranged orthogonally. The sensor units consist of two rotational-symmetric spiral channels and microelectromechanical system (MEMS) piezoresistive cantilevers. The cantilever is placed to interrupt the flow at the junctions of parallelly aligned spirals in each channel. When two cantilevers are used as the resistance of the bridge circuit in the two-gauge method, the rotational-symmetric spiral channels enhance the sensitivity in the target axis, while the nontarget axis sensitivities are canceled. The fabricated device responds with approximately constant sensitivity from 1 to 15 Hz, with a value of 3.86 × 10<sup>−</sup><sup>5</sup>/(rad/s<sup>2</sup>), which is equal to the theoretical value. The nontarget axis sensitivity is approximately 1/400 of the target axis sensitivity. In addition, we demonstrate that each unit responds according to the tilt angle when the device is tilted along the two corresponding rotational axis planes. Thus, it is concluded that the developed device realizes biaxial angular acceleration measurement with low crosstalk. |
| first_indexed | 2024-03-10T11:46:13Z |
| format | Article |
| id | doaj.art-6d4a3d86ca68475493fcfb2601280b54 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-10T11:46:13Z |
| publishDate | 2021-04-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-6d4a3d86ca68475493fcfb2601280b542023-11-21T18:02:28ZengMDPI AGMicromachines2072-666X2021-04-0112550710.3390/mi12050507Biaxial Angular Acceleration Sensor with Rotational-Symmetric Spiral Channels and MEMS Piezoresistive CantileversRihachiro Nakashima0Hidetoshi Takahashi1Department of Mechanical Engineering, Faculty of Science and Technology, Keio University, 3-14-1 Hiyoshi, Kouhoku-ku, Yokohama, Kanagawa 223-8522, JapanDepartment of Mechanical Engineering, Faculty of Science and Technology, Keio University, 3-14-1 Hiyoshi, Kouhoku-ku, Yokohama, Kanagawa 223-8522, JapanAngular acceleration sensors<b> </b>are attracting attention as sensors for monitoring rotational vibration. Many angular acceleration sensors have been developed; however, multiaxis measurement is still in a challenging stage. In this study, we propose a biaxial angular acceleration sensor with two uniaxial sensor units arranged orthogonally. The sensor units consist of two rotational-symmetric spiral channels and microelectromechanical system (MEMS) piezoresistive cantilevers. The cantilever is placed to interrupt the flow at the junctions of parallelly aligned spirals in each channel. When two cantilevers are used as the resistance of the bridge circuit in the two-gauge method, the rotational-symmetric spiral channels enhance the sensitivity in the target axis, while the nontarget axis sensitivities are canceled. The fabricated device responds with approximately constant sensitivity from 1 to 15 Hz, with a value of 3.86 × 10<sup>−</sup><sup>5</sup>/(rad/s<sup>2</sup>), which is equal to the theoretical value. The nontarget axis sensitivity is approximately 1/400 of the target axis sensitivity. In addition, we demonstrate that each unit responds according to the tilt angle when the device is tilted along the two corresponding rotational axis planes. Thus, it is concluded that the developed device realizes biaxial angular acceleration measurement with low crosstalk.https://www.mdpi.com/2072-666X/12/5/507angular acceleration sensorpiezoresistive cantileverspiral channeldifferential pressure sensor |
| spellingShingle | Rihachiro Nakashima Hidetoshi Takahashi Biaxial Angular Acceleration Sensor with Rotational-Symmetric Spiral Channels and MEMS Piezoresistive Cantilevers Micromachines angular acceleration sensor piezoresistive cantilever spiral channel differential pressure sensor |
| title | Biaxial Angular Acceleration Sensor with Rotational-Symmetric Spiral Channels and MEMS Piezoresistive Cantilevers |
| title_full | Biaxial Angular Acceleration Sensor with Rotational-Symmetric Spiral Channels and MEMS Piezoresistive Cantilevers |
| title_fullStr | Biaxial Angular Acceleration Sensor with Rotational-Symmetric Spiral Channels and MEMS Piezoresistive Cantilevers |
| title_full_unstemmed | Biaxial Angular Acceleration Sensor with Rotational-Symmetric Spiral Channels and MEMS Piezoresistive Cantilevers |
| title_short | Biaxial Angular Acceleration Sensor with Rotational-Symmetric Spiral Channels and MEMS Piezoresistive Cantilevers |
| title_sort | biaxial angular acceleration sensor with rotational symmetric spiral channels and mems piezoresistive cantilevers |
| topic | angular acceleration sensor piezoresistive cantilever spiral channel differential pressure sensor |
| url | https://www.mdpi.com/2072-666X/12/5/507 |
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