THE EFFECT OF Ge CONTENT ON THE OPTICAL AND ELECTRICAL PROPERTIES OF a-SiGe:H THIN FILMS
The effect of Ge content on the optical and electrical properties of Si-Ge-H thin films deposited by HWCPECVD had been investigated. The Si- Ge-H films ware grown on corning glass 7059 substrate using 10% diluted GeH4 and SiH4 gas mixture, respectively. The GeH4 gas flow rate was varied from 2.5 to...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Universitas Syiah Kuala, Faculty of Mathematics and Natural Science
2014-04-01
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| Series: | Jurnal Natural |
| Online Access: | http://www.jurnal.unsyiah.ac.id/natural/article/view/1171 |