Large Gradient Micro-Structure Topography Measurement with Multi-Angle Stitching Digital Holographic Microscope
We present an effective method for the topography characterization of large gradient micro-structure based on digital holographic microscope (DHM). Due to the limitation of numerical aperture of DHM system, high frequency information corresponding to large gradient regions of specimen is prohibited...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2020-09-01
|
| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/10/17/6110 |