An inductive RF discharge in water vapor for atomic-emission spectrometry
The paper presents the results of experimental measurements of the emission properties of water inductively coupled plasma. The plasma temperature is calculated using the Boltzmann method. It is shown that the temperature decreases with increasing pressure. The plasma resistance, its conductivity, a...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2017-01-01
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| Series: | MATEC Web of Conferences |
| Online Access: | https://doi.org/10.1051/matecconf/201711504001 |