Optimization of deposition parameters for thin film lithium phosphorus oxynitride (LIPON)
Thin film of lithium phosphorus oxynitride (LIPON) was successfully deposited by radio frequency (RF) magnetron sputtering technique using a Li3PO4 target. The optimal deposition parameters were determined for the thin films with the highest target-substrate distance. Characterization of deposited f...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
L.N. Gumilyov Eurasian National University
2021-11-01
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| Series: | Eurasian Journal of Physics and Functional Materials |
| Subjects: | |
| Online Access: | https://www.ephys.kz/jour/article/view/64 |