Optimization of deposition parameters for thin film lithium phosphorus oxynitride (LIPON)
Thin film of lithium phosphorus oxynitride (LIPON) was successfully deposited by radio frequency (RF) magnetron sputtering technique using a Li3PO4 target. The optimal deposition parameters were determined for the thin films with the highest target-substrate distance. Characterization of deposited f...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
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L.N. Gumilyov Eurasian National University
2021-11-01
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| Series: | Eurasian Journal of Physics and Functional Materials |
| Subjects: | |
| Online Access: | https://www.ephys.kz/jour/article/view/64 |
| _version_ | 1818755737473515520 |
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| author | B. .. Uzakbaiuly A. .. Mukanova I. .. Kurmabbayeva Z. B. Bakenov |
| author_facet | B. .. Uzakbaiuly A. .. Mukanova I. .. Kurmabbayeva Z. B. Bakenov |
| author_sort | B. .. Uzakbaiuly |
| collection | DOAJ |
| description | Thin film of lithium phosphorus oxynitride (LIPON) was successfully deposited by radio frequency (RF) magnetron sputtering technique using a Li3PO4 target. The optimal deposition parameters were determined for the thin films with the highest target-substrate distance. Characterization of deposited film was carried out by AFM, FTIR and Raman spectroscopy, which showed incorporation of nitrogen into the film as both doubly, Nd , and possibly triply, Nt, coordinated form. The ac impedance spectroscopy measurements revealed that the highest ionic conductivity of 1.1 µScm-1 was achieved at room temperature for the samples prepared at the optimum RF power and gas flow conditions. |
| first_indexed | 2024-12-18T05:43:54Z |
| format | Article |
| id | doaj.art-6db23c24e3d549479736dd98ac6c34aa |
| institution | Directory Open Access Journal |
| issn | 2522-9869 2616-8537 |
| language | English |
| last_indexed | 2024-12-18T05:43:54Z |
| publishDate | 2021-11-01 |
| publisher | L.N. Gumilyov Eurasian National University |
| record_format | Article |
| series | Eurasian Journal of Physics and Functional Materials |
| spelling | doaj.art-6db23c24e3d549479736dd98ac6c34aa2022-12-21T21:19:06ZengL.N. Gumilyov Eurasian National UniversityEurasian Journal of Physics and Functional Materials2522-98692616-85372021-11-013217418210.29317/ejpfm.201903020963Optimization of deposition parameters for thin film lithium phosphorus oxynitride (LIPON)B. .. Uzakbaiuly0A. .. Mukanova1I. .. Kurmabbayeva2Z. B. Bakenov3National Laboratory AstanaNazarbayev UniversityNational Laboratory AstanaNational Laboratory AstanaThin film of lithium phosphorus oxynitride (LIPON) was successfully deposited by radio frequency (RF) magnetron sputtering technique using a Li3PO4 target. The optimal deposition parameters were determined for the thin films with the highest target-substrate distance. Characterization of deposited film was carried out by AFM, FTIR and Raman spectroscopy, which showed incorporation of nitrogen into the film as both doubly, Nd , and possibly triply, Nt, coordinated form. The ac impedance spectroscopy measurements revealed that the highest ionic conductivity of 1.1 µScm-1 was achieved at room temperature for the samples prepared at the optimum RF power and gas flow conditions.https://www.ephys.kz/jour/article/view/64thin filmliponrf sputteringpvd |
| spellingShingle | B. .. Uzakbaiuly A. .. Mukanova I. .. Kurmabbayeva Z. B. Bakenov Optimization of deposition parameters for thin film lithium phosphorus oxynitride (LIPON) Eurasian Journal of Physics and Functional Materials thin film lipon rf sputtering pvd |
| title | Optimization of deposition parameters for thin film lithium phosphorus oxynitride (LIPON) |
| title_full | Optimization of deposition parameters for thin film lithium phosphorus oxynitride (LIPON) |
| title_fullStr | Optimization of deposition parameters for thin film lithium phosphorus oxynitride (LIPON) |
| title_full_unstemmed | Optimization of deposition parameters for thin film lithium phosphorus oxynitride (LIPON) |
| title_short | Optimization of deposition parameters for thin film lithium phosphorus oxynitride (LIPON) |
| title_sort | optimization of deposition parameters for thin film lithium phosphorus oxynitride lipon |
| topic | thin film lipon rf sputtering pvd |
| url | https://www.ephys.kz/jour/article/view/64 |
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