Ion-beam-induced in-plane a-axis oriented (0001) AlN and ScAlN thin film BAW resonators
High-Q RF bulk acoustic wave filters are still required for mobile communication applications. However, the in-plane orientation of commercial AlN films is random, despite their excellent out-of-plane c-axis orientation. We proposed combining two different orientation control techniques: self-textur...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2021-12-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0002307 |