Enhanced etching characteristics of Si{100} in NaOH-based two-component solution
Abstract Silicon wet bulk micromachining is the most widely used technique for the fabrication of diverse microstructures such as cantilevers, cavities, etc. in laboratory as well as in industry for micro-electromechanical system (MEMS) application. Although, increasing the throughput remains inevit...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
SpringerOpen
2022-08-01
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| Series: | Micro and Nano Systems Letters |
| Subjects: | |
| Online Access: | https://doi.org/10.1186/s40486-022-00152-9 |