Properties of Highly c-axis Oriented Single-crystalline ZnO Layers Grown by Sputter Epitaxy for Hydrogen Gas and UV Sensors
We have previously developed ultra-high vacuum RF magnetron sputtering systems. They can produce high-quality single-crystalline compound semiconductor layers without grain boundaries on sapphire substrates. We aim to utilize these semiconductor layers in high-sensitivity sensor devices used for det...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2019-01-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | https://sensorsportal.com/HTML/DIGEST/january_2019/Vol_229/P_3054.pdf |