Integrated Electromechanical Transduction Schemes for Polymer MEMS Sensors

Integrated Electromechanical Transduction Schemes for Polymer MEMS Sensors

Polymer Micro ElectroMechanical Systems (MEMS) have the potential to constitute a powerful alternative to silicon-based MEMS devices for sensing applications. Although the use of commercial photoresists as structural material in polymer MEMS has been widely reported, the integration of functional po...

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Bibliographic Details
Main Authors: Damien Thuau, Pierre-Henri Ducrot, Philippe Poulin, Isabelle Dufour, Cédric Ayela
Format: Article
Language:English
Published: MDPI AG 2018-04-01
Series:Micromachines
Subjects:
electromechanical transduction
polymer MEMS
piezoresistivity
piezoelectricity
Piezo-organic field effect transistor
Online Access:http://www.mdpi.com/2072-666X/9/5/197

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http://www.mdpi.com/2072-666X/9/5/197

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