High Accuracy Profile Measurement With a New Virtual Multi-Probe Scanning System

High Accuracy Profile Measurement With a New Virtual Multi-Probe Scanning System

We present a novel virtual multi-probe scanning system and a new error separation method for the exact optical profile reconstruction. The system realized the multi-probe function by a single probe that fixed on a flexible hinge stage. The flexible hinge stage has a millimeter-level travel range and...

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Bibliographic Details
Main Authors: Ning Chai, Ziqiang Yin, Jianhua Yao
Format: Article
Language:English
Published: IEEE 2020-01-01
Series:IEEE Access
Subjects:
Straightness
flexible hinge
multi-probe
error elimination
Online Access:https://ieeexplore.ieee.org/document/9181558/

Internet

https://ieeexplore.ieee.org/document/9181558/

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