High Accuracy Profile Measurement With a New Virtual Multi-Probe Scanning System
We present a novel virtual multi-probe scanning system and a new error separation method for the exact optical profile reconstruction. The system realized the multi-probe function by a single probe that fixed on a flexible hinge stage. The flexible hinge stage has a millimeter-level travel range and...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2020-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/9181558/ |
| _version_ | 1818853304149475328 |
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| author | Ning Chai Ziqiang Yin Jianhua Yao |
| author_facet | Ning Chai Ziqiang Yin Jianhua Yao |
| author_sort | Ning Chai |
| collection | DOAJ |
| description | We present a novel virtual multi-probe scanning system and a new error separation method for the exact optical profile reconstruction. The system realized the multi-probe function by a single probe that fixed on a flexible hinge stage. The flexible hinge stage has a millimeter-level travel range and driven by a voice coil motor to realize the function of the multi-probe. In this work, a high accuracy profile measurement with a high lateral resolution is realized under the errors of the straightness, zero-adjustment, and yaw. The new method can obtain multiple sets of straightness error of the guideway in one scanning measurement. This novel virtual multi-probe scanning system and its corresponding method has the following benefits: (i) using a single probe to separate straightness error without reversal, and can accurately reconstruct the profile, (ii) the reconstructed profile has a very high lateral resolution, depending on the lateral resolution (μm level) of the probe, (iii) the cumulative amplification effect of zero-adjustment error can be eliminated by our method, (iv) the new method can obtain multiple sets of straightness error with higher reliability and accuracy compared with only one set. These benefits are proved by theoretical derivation and simulation. Experiments also prove that the new method can reconstruct the profile with high accuracy and lateral resolution. |
| first_indexed | 2024-12-19T07:34:41Z |
| format | Article |
| id | doaj.art-6e3cd40d7816464180333a32815ebdbe |
| institution | Directory Open Access Journal |
| issn | 2169-3536 |
| language | English |
| last_indexed | 2024-12-19T07:34:41Z |
| publishDate | 2020-01-01 |
| publisher | IEEE |
| record_format | Article |
| series | IEEE Access |
| spelling | doaj.art-6e3cd40d7816464180333a32815ebdbe2022-12-21T20:30:36ZengIEEEIEEE Access2169-35362020-01-01815872715873410.1109/ACCESS.2020.30205719181558High Accuracy Profile Measurement With a New Virtual Multi-Probe Scanning SystemNing Chai0https://orcid.org/0000-0001-9900-8376Ziqiang Yin1https://orcid.org/0000-0002-6585-2680Jianhua Yao2https://orcid.org/0000-0001-5864-195XState Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou, ChinaState Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou, ChinaState Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou, ChinaWe present a novel virtual multi-probe scanning system and a new error separation method for the exact optical profile reconstruction. The system realized the multi-probe function by a single probe that fixed on a flexible hinge stage. The flexible hinge stage has a millimeter-level travel range and driven by a voice coil motor to realize the function of the multi-probe. In this work, a high accuracy profile measurement with a high lateral resolution is realized under the errors of the straightness, zero-adjustment, and yaw. The new method can obtain multiple sets of straightness error of the guideway in one scanning measurement. This novel virtual multi-probe scanning system and its corresponding method has the following benefits: (i) using a single probe to separate straightness error without reversal, and can accurately reconstruct the profile, (ii) the reconstructed profile has a very high lateral resolution, depending on the lateral resolution (μm level) of the probe, (iii) the cumulative amplification effect of zero-adjustment error can be eliminated by our method, (iv) the new method can obtain multiple sets of straightness error with higher reliability and accuracy compared with only one set. These benefits are proved by theoretical derivation and simulation. Experiments also prove that the new method can reconstruct the profile with high accuracy and lateral resolution.https://ieeexplore.ieee.org/document/9181558/Straightnessflexible hingemulti-probeerror elimination |
| spellingShingle | Ning Chai Ziqiang Yin Jianhua Yao High Accuracy Profile Measurement With a New Virtual Multi-Probe Scanning System IEEE Access Straightness flexible hinge multi-probe error elimination |
| title | High Accuracy Profile Measurement With a New Virtual Multi-Probe Scanning System |
| title_full | High Accuracy Profile Measurement With a New Virtual Multi-Probe Scanning System |
| title_fullStr | High Accuracy Profile Measurement With a New Virtual Multi-Probe Scanning System |
| title_full_unstemmed | High Accuracy Profile Measurement With a New Virtual Multi-Probe Scanning System |
| title_short | High Accuracy Profile Measurement With a New Virtual Multi-Probe Scanning System |
| title_sort | high accuracy profile measurement with a new virtual multi probe scanning system |
| topic | Straightness flexible hinge multi-probe error elimination |
| url | https://ieeexplore.ieee.org/document/9181558/ |
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